- #1
physicist888
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hi all
its an RBS ( rutherford back scattering) experiment. a Si3N4 thin film deposit on a Si substrat. we make a spectrometry analysis, and we obtain the scattering yield spectrum.
now back to chemistry, if we made an oxydation for this thin film while it deposite on the substrat, we'r going to obtain a new thin film of: SiO2 or SiOxNy ? and why?
i can't really solve this question. its really a chemistry question, maybe its about electronegativity of elements.
its an RBS ( rutherford back scattering) experiment. a Si3N4 thin film deposit on a Si substrat. we make a spectrometry analysis, and we obtain the scattering yield spectrum.
now back to chemistry, if we made an oxydation for this thin film while it deposite on the substrat, we'r going to obtain a new thin film of: SiO2 or SiOxNy ? and why?
i can't really solve this question. its really a chemistry question, maybe its about electronegativity of elements.