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What is "Proximity Effect Control" in ebeam lithography?

by samin
Tags: ebeam, lithography
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samin
#1
Jul9-14, 12:07 PM
P: 1
Hello all,

Can somebody explain to me what PEC (proximity effect control) means in nanofabrication?

Thanks
:)
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Greg Bernhardt
#2
Jul29-14, 02:11 PM
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