- #1
Enthalpy
- 667
- 4
Hello semiconductor technologists!
I'm thinking at a source of extreme UV for semiconductor lithography, so what would be your wishes, as compared to the first figures that emerge from my rantings?
I take 30nm wavelength. Would less be better? I fear fluorescence hampers lithography.
Right now I estimate half a watt of light is produced, continuous and monochromatic and coherent, initially in a narrow beam of small divergence. Could that be enough?
This absolute silver bullet would cost several millions. Is that any worry?
Thanks!
Marc Schaefer, aka Enthalpy
I'm thinking at a source of extreme UV for semiconductor lithography, so what would be your wishes, as compared to the first figures that emerge from my rantings?
I take 30nm wavelength. Would less be better? I fear fluorescence hampers lithography.
Right now I estimate half a watt of light is produced, continuous and monochromatic and coherent, initially in a narrow beam of small divergence. Could that be enough?
This absolute silver bullet would cost several millions. Is that any worry?
Thanks!
Marc Schaefer, aka Enthalpy