How has lithography evolved over the past 20 years in relation to Moore's laws?

In summary, researchers have been exploring the evolution of lithography techniques over the last 20 years, in relation to Moore's laws. One improvement has been increasing the energy of light used in exposure, leading to changes in resist chemistry. Another development is immersion lithography, which involves placing the wafer in water to decrease numerical aperture during exposure. The proposed next generation is EUV lithography with a wavelength of 13.5 nm, but this has introduced new challenges that are currently being addressed.
  • #1
Erik15
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researching "lithography"

I've been researching "lithography" and have been looking for some info on the evolution of various techniques that have improved this process over the last 20 years. Anybody have some knowledge on this? (In relation to Moore's laws).
 
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Given CD= k*(λ/NA), where CD is critical dimension (overall resolution essentially), λ= wavelength of light and NA is numerical aperture,

Well, one aspect of litho that has improved resolution has been simply to increase the energy (ie decrease wavelength) of light during exposure. This requires resist chemists to change their product to suit different energies.

Relatively recently, immersion litho started. This physically puts the wafer in water to decrease the NA during exposure.

EUV is the proposed next gen of light litho (13.5 nm vs current 193 nm light). Unfortunately, it is not so simple as just decreasing the wavelength of light. This has introduced a multitude of other issues that are being worked on in order to get the desired resolutions.

Are there any specific questions?
Cheers!
 

What is lithography?

Lithography is a method of printing or making images on a surface using a flat printing plate or stone with a smooth surface. It involves the use of chemicals and light to transfer an image onto a surface.

What are the different types of lithography?

The main types of lithography are planographic, relief, intaglio, and stencil. Planographic lithography involves using a flat printing plate, while relief lithography uses a raised surface. Intaglio lithography involves etching an image into a surface, and stencil lithography involves using a stencil to transfer an image onto a surface.

What is the purpose of researching lithography?

Researching lithography can help scientists understand the chemical and physical processes involved in the technique, as well as develop new and improved methods for creating images and printing. It can also lead to advancements in related fields such as microfabrication and nanotechnology.

What are the applications of lithography?

Lithography is widely used in the printing industry for creating books, magazines, and newspapers. It is also used in the manufacturing of electronic devices, such as computer chips and LCD screens. In addition, lithography has applications in art, scientific research, and forensic investigations.

What are the challenges in researching lithography?

Some of the challenges in researching lithography include the complexity of the chemical and physical processes involved, the need for precise control and measurement, and the potential environmental impact of using certain chemicals. Additionally, as technology advances, researchers must constantly adapt and improve lithography techniques to keep up with the demands of various industries.

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