- #1
anni
- 23
- 2
- Homework Statement
- photolithography
- Relevant Equations
- X-ray mask
Hi
I have a question. I don't know from which formula I can get the answer. I'm looking for in different books and papers but I did not find. I'm very appreciate if someone kindly guide.
Regards,
For an X-ray mask, what should the thicknesses of the silicon membrane and absorbers (gold or tungsten) be if 80% transmission through Si and a 5 times weaker transmission through the absorbers is required considering emission of the Al line (0.834 nm).
I have a question. I don't know from which formula I can get the answer. I'm looking for in different books and papers but I did not find. I'm very appreciate if someone kindly guide.
Regards,
For an X-ray mask, what should the thicknesses of the silicon membrane and absorbers (gold or tungsten) be if 80% transmission through Si and a 5 times weaker transmission through the absorbers is required considering emission of the Al line (0.834 nm).