Thanks for the reply..but i am afraid we cannot use corrosive acids like HF.. So please tell if u are familiar with acids like citric acid, succinic acid.etc..
Can anyone please help me with the selective etching of GaAs w.r.to Al0.3Ga0.7As..
I have tried out many compositions using the citric acid and hydrogen peroxide and none of them given in the literature work...Please help
Ravi