Help Ravi Selectively Etch GaAs w.r.to Al0.3Ga0.7As

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Discussion Overview

The discussion focuses on the selective etching of Gallium Arsenide (GaAs) with respect to Aluminum Gallium Arsenide (Al0.3Ga0.7As). Participants explore various chemical compositions and methods, particularly emphasizing the use of citric acid and hydrogen peroxide, while considering alternatives due to safety concerns with more corrosive acids.

Discussion Character

  • Technical explanation
  • Debate/contested
  • Experimental/applied

Main Points Raised

  • Ravi seeks assistance with selective etching of GaAs using citric acid and hydrogen peroxide but reports unsuccessful attempts with literature-recommended compositions.
  • One participant suggests that selective etching may require electric current or polarization and proposes using fluoride or chloride ions, specifically recommending a mixture of HF/HCl in HNO3, while cautioning about the dangers of HF.
  • Ravi expresses concern about using corrosive acids like HF and requests information on safer alternatives such as citric acid and succinic acid.
  • Another participant prompts Ravi to conduct a literature search and references a specific study that discusses selective etching of GaAs using a citric acid/H2O2/H2O system.
  • A later reply indicates that using sodium fluoride could achieve similar effects to HF without needing to use HF directly, while still advising caution.

Areas of Agreement / Disagreement

Participants express differing views on the necessity and safety of using HF for selective etching, with some advocating for its use and others seeking alternatives. The discussion remains unresolved regarding the best approach to achieve selective etching safely.

Contextual Notes

Participants have not reached a consensus on the most effective etching method, and there are varying opinions on the use of different chemicals and their safety implications.

physics2010
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Can anyone please help me with the selective etching of GaAs w.r.to Al0.3Ga0.7As..
I have tried out many compositions using the citric acid and hydrogen peroxide and none of them given in the literature work...Please help

Ravi
 
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Selective etching might require an electric current or polarization. Also Al is perhaps better etch with a fluoride or chloride ion present. HF/HCl in HNO3 might work. Be very careful with HF - it's nasty stuff.

However, I'm not familiar with Al-Ga-As.
 
Thanks for the reply..but i am afraid we cannot use corrosive acids like HF.. So please tell if u are familiar with acids like citric acid, succinic acid.etc..
 
Have you already done the literature search? I looked up gaas etching on Google, and got this one on the first page:

Liao, C., Houng, M., and Wang, Y. "Highly Selective Etching of GaAs on Al0.2Ga0.8As Using Citric Acid/H2O2/H2O Etching System". Electrochem. Solid-State Lett., Volume 7, Issue 11, pp. C129-C132 (2004)
http://dx.doi.org/10.1149/1.1803072
 
You don't have to use HF - it can be enough to add F- (for example sodium fluoride) to get the same effect. Still, you have to be cautious.

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