Hello, I am trying to create peak models for some XPS spectra. I have a decent intuition of the chemistry of the samples, and I obtain really good residual standard deviation values for the modeled data; however, some of the FWHM of the modeled oxidized species (C and P) on the narrow scans are as high as 2.3 eV. Is this due to X-ray damage? or maybe wrong modeling? or is a FWHM of 2.4 eV OK for C and/or P high resolution narrow scans. I am not an expert so please answer kindly. Thanks a lot!!!!