Atomic Structure of Wet Oxidized Silicon

[sezhesta]

Hello everyone,

I would like to buy some Si wafer with SiO2 layer on it. The manufacturer told me that they obtain the SiO2 with a wet oxidation process.

My question is, would this layer be amorphous or crystalline or polycrystalline?

Thanks!

 

[Simon Bridge]

You'll have to ask the manufacturer.

 

[ehild]

The wet oxide layer is amorphous (glassy) like fused silica. Consist of regular silicon-oxide tetrahedrons, mostly making 6-member rings, like in cristobalite, but without long-range order.

ehild

 

[Simon Bridge]

Welcome to PF BTW.