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Atomic Structure of Wet Oxidized Silicon

  1. Jul 10, 2013 #1
    Hello everyone,

    I would like to buy some Si wafer with SiO2 layer on it. The manufacturer told me that they obtain the SiO2 with a wet oxidation process.

    My question is, would this layer be amorphous or crystalline or polycrystalline?

    Thanks!
     
  2. jcsd
  3. Jul 10, 2013 #2

    Simon Bridge

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    You'll have to ask the manufacturer.
     
  4. Jul 15, 2013 #3

    ehild

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    The wet oxide layer is amorphous (glassy) like fused silica. Consist of regular silicon-oxide tetrahedrons, mostly making 6-member rings, like in cristobalite, but without long-range order.

    ehild
     
  5. Jul 15, 2013 #4

    Simon Bridge

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    Welcome to PF BTW.
     
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