Atomic Structure of Wet Oxidized Silicon

  • Thread starter sezhesta
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Hello everyone,

I would like to buy some Si wafer with SiO2 layer on it. The manufacturer told me that they obtain the SiO2 with a wet oxidation process.

My question is, would this layer be amorphous or crystalline or polycrystalline?

Thanks!
 

Simon Bridge

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You'll have to ask the manufacturer.
 

ehild

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The wet oxide layer is amorphous (glassy) like fused silica. Consist of regular silicon-oxide tetrahedrons, mostly making 6-member rings, like in cristobalite, but without long-range order.

ehild
 

Simon Bridge

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Welcome to PF BTW.
 

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