I was wondering why UV ellipsometry is better than visible ellipsometry?
Better for what?
I meant, for certain materials, it is better to use UV light source to measure thin film thickness, and sometimes it is better to use a visible or NIR light source. Can someone please give me a couple of examples of materials that are determined using UV, VIS, and NIR? Why is it good to have the whole UV-VIS-NIR spectrum in an ellipsometer?
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