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Engineering
Materials and Chemical Engineering
Getting the concentration from Scanning Electron Microscope
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[QUOTE="schrodingerscat11, post: 4151209, member: 344384"] Greetings! I am doing particle analysis using a JEOL 5310 Scanning Electron Microscope (SEM). Typically, people here in the lab report the results in % Element or % Atomic. I think the former refers to the weight percentage of an element and the latter to the stoichiometric ratio of elements with each other. Anyway, is there a way to get the concentration of the element of the particle in terms of ppm (parts per million)? Also, what to the fields in the EDX output mean? The Apparent conc., stat. sigma, k ratio, k ratio sigma, Inten. Corrn., Std. Corrn.? Here is an example output of an Energy Dispersive X-ray (EDX) analysis: =================================================================== [FONT="Courier New"]SEMQuant results. Listed at 6:37:31 PM on 10/3/12 Operator: Oxford Client: All ISIS users Job: Demonstration data SiLi detector Spectrum label: Calibration data: Energy Resn. Area Strobe: -8.8 49.21 90606 Calib. element: 6915.1 140.83 37196 Gain factor = 49.989 Livetime = 100.0 seconds Sample data: Energy Resn. Area Strobe: -7.4 53.64 54030 Total spectrum counts = 5342 Livetime = 56.2 seconds System resolution = 70 eV Geometry (degrees): Tilt = 0.00 ED geometry (degrees): Elevation = 45.00 Azimuth = 0.00 Entry angle = 0.00 Accelerating voltage = 20.00 kV Quantitative method: ZAF ( 4 iterations). Analysed all elements and normalised results. Standards : C K CaCO3 01/12/93 Cl K KCl 15/02/94 Ca K Wollas 23/11/93 V K V 01/12/93 Co K Co 01/12/93 Br K KBr 07/12/93 Zr L Zr 01/12/93 Au M Au 01/12/93 Hg M HgTe 01/12/93 [B]Elmt Spect. Apparent Stat. k Ratio k Ratio Type Conc. Sigma Sigma [/B] C K ED 12.754 0.297 1.06280 0.02478 Cl K ED 0.040* 0.032 0.00084* 0.00067 Ca K ED 0.068* 0.044 0.00199* 0.00129 V K ED 0.006* 0.048 0.00006* 0.00048 Co K ED 0.030* 0.074 0.00030* 0.00074 Br K ED 0.060* 0.461 0.00089* 0.00687 Zr L ED 0.113* 0.150 0.00113* 0.00150 Au M ED 2.021 0.177 0.02021 0.00177 Hg M ED 0.128* 0.226 0.00210* 0.00370 [B]Elmt Spect. Inten. Std Element Sigma Atomic Type Corrn. Corrn. % % % [/B] C K ED 1.093 1.46 80.20 3.66 98.10 Cl K ED 0.847 1.02 0.33* 0.26 0.13* Ca K ED 1.028 1.00 0.46* 0.29 0.17* V K ED 0.872 1.00 0.05* 0.38 0.01* Co K ED 0.880 1.00 0.23* 0.58 0.06* Br K ED 0.853 1.00 0.48* 3.70 0.09* Zr L ED 0.895 1.05 0.87* 1.14 0.14* Au M ED 0.844 1.05 16.44 1.43 1.23 Hg M ED 0.929 1.05 0.95* 1.65 0.07* Total 100.00 100.00 * = <2 Sigma [/FONT] =================================================================== Thank you very much for your help. [/QUOTE]
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Engineering
Materials and Chemical Engineering
Getting the concentration from Scanning Electron Microscope
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