How Do You Calculate Sheet Resistance of a Copper Layer in an IC?

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SUMMARY

The sheet resistance of a copper layer in an integrated circuit (IC) can be calculated using the formula R = ρ * (L/A), where ρ is the resistivity. For a copper layer with a thickness of 100 nm and a resistivity of 1.7 μΩ·cm at 27°C, the sheet resistance can be determined by dividing the resistivity by the thickness. This calculation is essential for understanding the electrical properties of interconnecting tracks in ICs.

PREREQUISITES
  • Understanding of electrical resistance and resistivity
  • Familiarity with the concept of sheet resistance
  • Basic knowledge of integrated circuit (IC) design
  • Ability to perform unit conversions (e.g., nm to cm)
NEXT STEPS
  • Learn how to apply the sheet resistance formula in practical scenarios
  • Research the effects of temperature on copper resistivity
  • Explore advanced topics in semiconductor materials and their properties
  • Study the impact of layer thickness on electrical performance in ICs
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Electrical engineers, semiconductor researchers, and students studying integrated circuit design will benefit from this discussion on calculating sheet resistance in copper layers.

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Homework Statement


he thickness of a copper layer, deposited to create the interconnecting tracks in an IC is 100 nm. Copper resistivity: 1.7 at 0.0039 degrees C^(-1)
What is the sheet resistance of the copper layer at 27 C?

Homework Equations


The Attempt at a Solution


I don't know what equations to use to calculate the sheet resistance. Can I get some assistance in what equation to use?
 
Last edited:
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sup17 said:

Homework Statement


he thickness of a copper layer, deposited to create the interconnecting tracks in an IC is 100 nm. Copper resistivity: 1.7 at 0.0039 degrees C^(-1)
What is the sheet resistance of the copper layer at 27 C?


Homework Equations





The Attempt at a Solution


I don't know what equations to use to calculate the sheet resistance. Can I get some assistance in what equation to use?

Please re-post the question -- there appear to be typos in the post. Also include units for each quantity.

The basic equation for resistance is

R = \rho \frac{L}{A}

Are you familiar with that equation?
 
Thanks! That really helps.
 

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