Measuring TiAlSiN Coating Multilayer Thickness

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Discussion Overview

The discussion revolves around methods for measuring the thickness of multilayer TiAlSiN coatings, which consist of crystalline TiN and amorphous (Al,Si)N layers. Participants explore various measurement techniques suitable for layers estimated to be in the nanometer range.

Discussion Character

  • Exploratory
  • Technical explanation
  • Debate/contested

Main Points Raised

  • One participant suggests using X-ray fluorescence to measure layer thicknesses, noting that analyzing the spectra for multilayer systems is complex.
  • Another participant proposes X-ray absorption as a potential method for measuring thickness.
  • A different viewpoint mentions that simpler methods like ball indentation may not achieve the desired resolution for such thin layers.
  • One participant emphasizes the preference for non-destructive methods, suggesting that optical measurements with techniques like electron microscopy would be straightforward if destructive methods were acceptable.
  • A later reply indicates that Transmission Electron Microscopy (TEM) cross-sectioning could be a viable approach for estimating layer thickness, with plans to pursue this method in the future.

Areas of Agreement / Disagreement

Participants express various opinions on measurement methods, with no consensus on the best approach. Multiple competing views on the effectiveness and practicality of different techniques remain unresolved.

Contextual Notes

Some methods mentioned may depend on specific conditions or assumptions regarding the multilayer structure, such as the presence of alternating layers. The discussion does not clarify the limitations or requirements of each proposed method.

Who May Find This Useful

Researchers and practitioners involved in materials science, particularly those focused on coating technologies and thin film measurements.

vinhphysics
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Hi!
I am doing research on TiAlSiN coatings. The coatings are multilayers of crystalline TiN and amorphous (Al,Si)N. The thickness of each layer is estimated about some nano-meters. The question is How can I measure the thickness of each layer? and What measurement of method is the best?
Thanks you!
 
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X-ray fluorescence can be used to measure the layer thicknesses(is this even a word?). The analysis of the spectra to extract the thicknesses from a multilayer system isn't a trivial procedure though. X-ray absorption should do the trick too. I'm sure there are easier ways but those two were the first that I though of.
 
Simplest methods are probably the likes of ball indentation, but don't know whether you can get the resolution you want with plain mechanical based ones.
 
vinhphysics said:
Hi!
I am doing research on TiAlSiN coatings. The coatings are multilayers of crystalline TiN and amorphous (Al,Si)N. The thickness of each layer is estimated about some nano-meters. The question is How can I measure the thickness of each layer? and What measurement of method is the best?
Thanks you!
I presume the interest is for a non-destructive method, otherwise it would be simple to do a ceramograph/metalograph and measure optically with something like an electron microscope.

Are there multiple (alternating) layers? e.g. T/A/T/A/. . . . where T = TiN and A = (Al,Si).
 
Thanks you!

I think TEM cross section can be used to estimate the thickness of layer. I will try to do it in near future.
Thanks you for your interest.
 

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