It depends on what you are trying to calculate. DC properties?
metal on a semiconductor sounds like a Schottky barrier.
Setting up a model for a metal film on an insulating substrate (no free carriers) isn't very hard. The main problem with those types of calculation is if you actually need to consider the metal film to have some thickness; in which can the mesh sizes can get very small.
If the substrate is a seminconductor the complexity of the problem very much depends on exactly what you are trying to calculate; in some cases you can get away with considering the semiconductor to be an insulator.