- #1
lamejane
- 11
- 2
Hello PVD experts out there !
I have question on general e-PVD Vacuum chamber cleaning maintenance and Care
as shown in the pictures below, Thin film material (mostly Metals) is being deposited on a daily basis onto the hardware parts present in our e-PVD vacuum chamber ( such as the quartz crystal shutter, crystal container, Crucible revolver etc.)
We use a clean room grade vacuum cleaner to clean out the delaminated film from the chamber walls after each deposition process but not all the metal is removed since they adhere quite strongly onto the copper and stainless steel surfaces.
Question to the experts here:
What procedures are normally used to clean the thin-film Metal coating on the hardware parts? Is there a special scotch brite like scrubber (clean room grade) for such purposes?. Would a High power Laser cleaning such as in the link below help?
https://www.cleanlaser.de/wEnglish/produkte/high-power-cl-1000.php
Covering the hardware parts with Al foil is not an option because of possible Al contamination on the wafers being deposited.
Looking forward to your expertise : ).
Thank you .
I have question on general e-PVD Vacuum chamber cleaning maintenance and Care
as shown in the pictures below, Thin film material (mostly Metals) is being deposited on a daily basis onto the hardware parts present in our e-PVD vacuum chamber ( such as the quartz crystal shutter, crystal container, Crucible revolver etc.)
We use a clean room grade vacuum cleaner to clean out the delaminated film from the chamber walls after each deposition process but not all the metal is removed since they adhere quite strongly onto the copper and stainless steel surfaces.
Question to the experts here:
What procedures are normally used to clean the thin-film Metal coating on the hardware parts? Is there a special scotch brite like scrubber (clean room grade) for such purposes?. Would a High power Laser cleaning such as in the link below help?
https://www.cleanlaser.de/wEnglish/produkte/high-power-cl-1000.php
Covering the hardware parts with Al foil is not an option because of possible Al contamination on the wafers being deposited.
Looking forward to your expertise : ).
Thank you .