Effective annealing parameters in N-doped Zinc oxide

[ralden]

Good day every one!

Based on my research as you increased the temperature, the grain size become bigger and the thickness decreased, but in some paper, thickness increased. The effects of annealing temperature is almost the same to the temperature. But if you will considering doping for example nitrogen in Zinc oxide film, many papers suggest that as you increased the temperature and annealing time, there is an aging effect where Nitrogen concentration decreases. In my research my goal is to keep the the concentration of Nitrogen constant and have an enough crystal uniformity. So i will not consider higher temp like 500 and up (base on related literature) and longer annealing time. But what exactly the effective annealing temperature and annealing for N-doped zinc oxide?

Thanks in advance!

 

[_coyote_]

From my research it appears that the optimal annealing temperature and time for N-doped zinc oxide depend on the desired properties of the film. Generally, it is suggested to use a lower temperature (400°C or less) for longer annealing times (up to 5 hours) in order to obtain better crystallinity and uniformity of the film. For higher annealing temperatures, shorter annealing times are recommended (30 minutes or less) in order to avoid the aging effect. It is important to note that the nitrogen concentration may decrease with temperature, so it is important to carefully monitor the nitrogen concentration during the annealing process.