The ridges can be eliminated by using a underlying coat of material called BARC (Bottom - Anti -reflective Coating) which is applied under the photoresist material.
However, that does not answer the basic physics questions that I have raised. That question is how do we explain these ridges in...
First, the quantum mechanical view is extremely important here. Why because the light sources are not black body radiators. We are dealing with essentially monochromatic light that is emitted by atoms - electrons changing well defined states. Thus we cannot shut out the discussion of the photon...
Yes you can Google "standing wave patterns in photoresist" and hundreds of sites will appear. What I suggest you do is Goggle the term and then switch to image mode, there you will find many examples. (SEM micrographs). Here is one such page that illustrates the issue...
Let me start off with a reference: http://www.lithoguru.com/scientist/lithobasics.html This is an article about the field of lithography and microlithography. Before anyone dismisses the importance of this technology , let me point out that it is used to make EVERY integrated circuit and...
I have many questions to ask and it is really impossible to find a single peer reviewed article. I was under the impression that the first thread was one of introduction and should contain no questions.
Sincerely James T Clemens, PhD
Well, I will tell you a true story. When I was young - late 20's, my wife and I went on a vacation and I made all the reservations. To make sure that I got the reservations, I registered as Dr. James Clemens. Sounds simple enough and quite trivial.
However, when I checked into a lodge in the...
I am a formally trained theoretical physicist and I received my degree in 1969. I then worked at AT&T Bell Laboratories for 30 years. The first fifteen years were in a branch lab connected to a manufacturing site in Allentown Pennsylvania.
Based upon a series of my published technical...