A question about photolithography (optical lithography)?

[Hananism]

I want to know what are the exposure methods that are used in photolithography?
I've heard there are three, but not sure about them ..
Thanks

 

[berkeman]

Welcome to PF.

Please show us what you have found so far (including links to your reading). That will help us to help you find the information you are looking for.

 

[berkeman]

Also, is this question for schoolwork? If so, I can move your thread to the schoolwork forums for you.

 

[DaveE]

This is a really broad subject. Ranging from making your own circuit boards in your garage to the highest technology semiconductor manufacturing, which pushes the limits of experimental physics. So it may help to focus on what sort of applications you are interested in. Your question is only slightly less complicated to me than "explain chemistry". We also don't know your educational background, which we can (sort of) tell from a more specific question.

I can think of 3 methods easily, but I know there are more. That sounds like a pretty arbitrary distinction, why doesn't a 4th method count?

Anyway, as @berkeman said, start by searching online and reading a bit and ask us to explain the parts you don't understand.

 

[berkeman]

We also don't know your educational background, which we can (sort of) tell from a more specific question.

His Profile, About page says he is working on his Master's degree in Nanotechnology:

https://www.physicsforums.com/members/hananism.696127/#about

(so this is indeed likely to be a schoolwork question)...