Atomic Layer Deposition Reactor Design?

[SupaVillain]

Is it made of quartz or stainless steel/aluminum or what? Does it matter which?that's all I need to know, I just can't seem to find if they can be made of standard vacuum metals or if they have to be quartz. Only really seen some diagrams mention quartz tubes but the pictures of large ones seem to be a large (grocery cart size) metal sphere reactor

 

[SupaVillain]

I see now that there's ones that work off of molecular beam epitaxy and ones that work off of gaseous precursors in the range of millitorr. I am asking about the one that uses gaseous precursors, NOT MBE, as I already know that method is with a large stainless or aluminum reactor

 

[Astronuc]

The answer may depend on the reactants, e.g., atomic hydrogen.

Some examples:

Quartz tube reactor
http://www.dtic.mil/dtic/tr/fulltext/u2/a250607.pdf

Proceedings of the Third International Symposium on Diamond Materials - look for fused silica or pyrex.

http://encyclopedia.che.engin.umich.edu/Pages/Reactors/CVDReactors/CVDReactors.html

http://www.ewp.rpi.edu/hartford/users/papers/engr/ernesto/morens/EP/References/CVD%20Processes%20and%20Equipment.pdf (seem to be mostly quartz or fused silica)

I'd have to dig deep in my archives to find some examples from 30+ years ago to see if any where metal chambers. I do remember some plasma vapor deposition systems, but I don't recall the reaction chamber material. It may be the graphite or Mo were used for certain applications, but it's been decades since I looked at various processes.

I would think that fluorides or HF would be problematic in quartz or silica systems.