The discussion focuses on the materials used in Atomic Layer Deposition (ALD) reactors, specifically questioning whether quartz or metals like stainless steel and aluminum are appropriate for reactors utilizing gaseous precursors. It is established that quartz tubes are commonly used, particularly in chemical vapor deposition (CVD) processes, while metal reactors are typically associated with molecular beam epitaxy (MBE). The choice of reactor material may depend on the specific reactants involved, such as atomic hydrogen, and the potential reactivity of materials like fluorides with quartz. Historical references indicate that metal chambers may have been used in older systems, but quartz remains prevalent in modern applications.
PREREQUISITESThis discussion is beneficial for materials scientists, chemical engineers, and professionals involved in the design and optimization of Atomic Layer Deposition reactors, particularly those focused on the choice of reactor materials and their implications on process efficiency.