Graduate Does molybdenum react with an Argon plasma powered by RF power?

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SUMMARY

This discussion focuses on the reactivity of molybdenum in an RF-powered Argon plasma environment. Molybdenum is identified as a metal that, while resistant to RF sputtering, is still susceptible to being sputtered by the plasma. Tungsten is recommended as a more suitable alternative due to its superior resistance to RF sputtering. The conversation highlights the importance of selecting the right material for applications involving Argon plasma.

PREREQUISITES
  • Understanding of RF plasma technology
  • Knowledge of material properties, specifically sputtering resistance
  • Familiarity with metal reactivity in plasma environments
  • Basic principles of plasma physics
NEXT STEPS
  • Research the properties of tungsten in RF plasma applications
  • Explore the mechanisms of RF sputtering and its effects on different metals
  • Investigate alternative materials for use in Argon plasma environments
  • Learn about the design and implementation of metal probes in plasma systems
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Materials scientists, plasma physicists, engineers working with RF plasma systems, and anyone involved in the development of metal probes for plasma applications.

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I'm thinking of implementing a metal disk-like probe in an Argon plasma which is powered by RF. Therefore I need to know a metal that's least reactive with the plasma. Does molybdenum meets this requirement?
 
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RF excited argon plasma will sputter molybdenum as well as any other element. In general, heavy elements are more resistant to RF sputtering though. Tungsten is popular if sputtering resistance is required.
 
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