Finding the Right EDS/EDX System for Nano-Analysis

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When selecting an EDS/EDX system for nano-analysis of structures fabricated by the EBID technique, spatial resolution is critical, especially for 3 nm diameter structures. The choice of detector size is debated, with recommendations ranging from 10mm2 to 60mm2 active areas, leading to confusion among users. It is essential to consider the specific imaging requirements and the capabilities of the FESEM being used, including whether a cold cathode type is preferred. Different companies provide varying suggestions, highlighting the need for thorough research and possibly direct user experiences. Ultimately, the right detector will depend on the desired resolution and the specific application requirements.
Tempum
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Hi,

I have to look for a new EDS/EDX system for nano-analysis. We want to inspect structures fabricated by EBID technique of 3 nm diameter (we can imagine them with high voltages, from 5kV to 30kV, without any problem): spatial resolution is thus basilar.

What kind of detector should I consider? A 10mm2 active area or a larger one?

I contacted different companies and they are giving me complitely different suggestions (some of them said I should consider 10mm2 detectors, other at least 60mm2 detectors).
 
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Are you using FESEM for imaging the nano particle? What type- cold cathode?
 

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