How Do You Calculate Sheet Resistance of a Copper Layer in an IC?

[sup17]

Homework Statement

he thickness of a copper layer, deposited to create the interconnecting tracks in an IC is 100 nm. Copper resistivity: 1.7 at 0.0039 degrees C^(-1)
What is the sheet resistance of the copper layer at 27 C?

Homework Equations

The Attempt at a Solution

I don't know what equations to use to calculate the sheet resistance. Can I get some assistance in what equation to use?

 

[berkeman]

Homework Statement

he thickness of a copper layer, deposited to create the interconnecting tracks in an IC is 100 nm. Copper resistivity: 1.7 at 0.0039 degrees C^(-1)
What is the sheet resistance of the copper layer at 27 C?

Homework Equations

The Attempt at a Solution

I don't know what equations to use to calculate the sheet resistance. Can I get some assistance in what equation to use?

Please re-post the question -- there appear to be typos in the post. Also include units for each quantity.

The basic equation for resistance is

$$R = \rho \frac{L}{A}$$

Are you familiar with that equation?

 

[phyzguy]

Sheet resistance of a film is just the resistivity divided by the thickness:

http://en.wikipedia.org/wiki/Sheet_resistance

 

[sup17]

Thanks! That really helps.