How much the dielectric loss tangent of 10 nm thick SiO2 ?

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SUMMARY

The dielectric loss tangent of 10 nm thick SiO2 at 1 GHz is a critical parameter for MOSFET applications. Current literature indicates that the loss tangent for SiO2 at this thickness is typically low, but specific values can vary based on fabrication methods and material purity. Researchers are encouraged to consult recent studies and experimental data to obtain precise measurements relevant to their specific applications.

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How much the dielectric loss tangent of 10 nm thick SiO2 at 1Ghz ?
I am studying the MOSFETs i want to know the the dielectric loss tangent of SiO2 dielectric at such manometer thickness, So if anybody know any reference about it Please let me know..
 
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