One classic experiment in the early history of quantum optics involving single photons, beam splitters, and a Mach Zehnder interferometer is
P. Grangier, G. Roger and A. Aspect, Experimental Evidence for a Photon Anticorrelation Effect on a Beam Splitter: A New Light on Single-Photon Interferences, EPL 1, 173 (1986)
https://iopscience.iop.org/article/10.1209/0295-5075/1/4/004/meta
One should note that before the mid 1980ies there was not much true evidence for specific effects that are only correctly described with the quantized electromagnetic fields. Almost all experiments believed to show field quantization are as well describable in the semiclassical approximation, where only the detector material is treated as quantized (e.g., the photo effect a la Einstein 1905 is completely understandable by describing the electromagnetic field as classical interacting with a bound electron; the same holds for the Compton effect). The first theoretical hint for field quantization was Einstein's derivation of the Planck formula for black-body radiation by kinetic theory, where Einstein had to assume that besides the (semi-)classical effects of absorption and induced emission also another transition mechanism is at work, which is spontaneous emission, according to which an excited state of an atom must also decay under emission of a photon without any other radiation present. This is the most simple effect really showing field quantization.
The difficulty for the early experimenters was the lack of efficient single-photon sources, i.e., sources where you have for sure a single photon, i.e., a with certainty prepared single-photon Fock state of the em. field. As in the above famous example in the early days of the mid 1980ies the experimenters used atomic cascades as single-photon sources.
The interest was also high at this time because of Bell's work about possible hidden-variable interpretations of quantum theory. Famously Aspect, also using atom cascade photon sources was the first to experimentally demonstrate the violation of Bell's inequality hinting at the impossibility of any local deterministic hidden-variable theory explaining the effects predicted by QT in terms of stronger-than-classical correlations described by entangled states.