# MIcrofabrication suggestion required

• farahtc
In summary, the conversation is about solving a problem involving a silicon wafer with a thickness of 500 μm and a front surface of {100}. The goal is to find the size of a rectangular window on the other side of the wafer, given that the etch rate for {111} surfaces is 1/100 that of {100} surfaces. The solution involves finding the crystalline angle of the {111} planes and using it to set up an equation that takes into account the lateral etching. Suggestions for resources to help with this problem include Marc Madou's book "Fundamentals of Microfabrication" and various websites and online lecture notes on silicon anisotropic etching.
farahtc
A silicon wafer is 500 μm thick. The front surface is {100}. A mask consists of a rectangular window of unknown size. The sides of the window are parallel to <110>. After through-wafer etch, a window (50 μm by 80 μm) is formed on the other side of the wafer. Find the size of the original mask window assuming the etch rate of {111} surfaces is 1/100 that of {100} surfaces.

I need to solve this one. Can anyone suggest any book/website from where I can get some help regarding this one?

You need to find the crystalline angle of the {111} planes, which is a constant and can be found in many places. Then you can set up an equation incorporating the slight lateral etching to find the original opening size. There are many websites and online lecture notes that discuss silicon anisotropic etching, so it shouldn't be too difficult.

Marc Madou's Fundamental of Microfabrication will tell you exactly what's going on and is a great reference for microfabrication / nanofabrication / MEMS questions.

Hello,

Thank you for your question. I would suggest looking into microfabrication textbooks or websites that specialize in silicon wafer etching techniques. Some good resources to consider are "Introduction to Microfabrication" by Sami Franssila and "Microfabrication for Industrial Applications" by Mark J. Madou. Additionally, you may want to consult with a colleague or mentor who has experience in microfabrication to get their insight and advice on solving this problem. Good luck!

## What is microfabrication?

Microfabrication is the process of creating small structures and devices on a microscopic scale. It involves techniques such as lithography, etching, and deposition to pattern and manipulate materials at the microscale.

## What are the applications of microfabrication?

Microfabrication has a wide range of applications, including in the fields of electronics, biomedical engineering, and optics. It is used to create microchips, sensors, microfluidic devices, and other advanced technologies.

## What materials can be used for microfabrication?

Common materials used in microfabrication include silicon, polymers, metals, and ceramics. These materials are chosen for their unique properties and compatibility with microfabrication processes.

## What are the challenges in microfabrication?

One of the main challenges in microfabrication is achieving high precision and accuracy at such a small scale. This requires specialized equipment and techniques, as well as extensive knowledge and experience in the field.

## What are some tips for successful microfabrication?

To successfully fabricate microstructures, it is important to carefully plan and design the process, choose appropriate materials and equipment, and optimize process parameters. Attention to detail and a thorough understanding of the techniques involved are also crucial for achieving desired results.

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