What is the impact of bias on DC sputtering for thin film deposition?

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    Bias Sputtering
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Discussion Overview

The discussion centers on the role of bias in DC sputtering for thin film deposition, specifically examining whether applying bias affects the plasma build-up and the resulting film characteristics, despite achieving similar thicknesses in both cases.

Discussion Character

  • Exploratory, Technical explanation, Debate/contested

Main Points Raised

  • One participant questions the differences in film characteristics when bias is applied versus when it is not, despite obtaining the same thickness of the thin film layer.
  • Another participant asks whether the film structure differs in both scenarios and suggests that imaging may provide insights, noting that the material used could influence the outcome.
  • A participant mentions using XRF measurement for thickness assessment and expresses uncertainty about how to determine the appropriateness of using bias based on material.
  • One reply emphasizes that the choice to use bias should depend on the specific application and suggests researching literature to understand the advantages of biasing for the material in question.

Areas of Agreement / Disagreement

Participants do not reach a consensus on the impact of bias in DC sputtering, indicating that multiple competing views remain regarding its necessity and effects on film characteristics.

Contextual Notes

Participants note the importance of material properties and application context, suggesting that the appropriateness of bias may depend on specific conditions that are not fully explored in the discussion.

Who May Find This Useful

This discussion may be useful for researchers and practitioners in thin film deposition, particularly those exploring the effects of bias in DC sputtering processes.

kimmylsm
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Hi, I would like to know when deposition using DC sputtering, bias play a role in plasma build-up, but with bias applied and without bias applied, still obtain the same thickness of thin film layer, what actually the differences between bias and without bias during DC sputtering? Thanks.
 
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Is the film structure the same in both cases? Did you do imaging? It depends on what material you're working with.
 
the target source is the same in both cases, no imaging done, if it depend on what material i used, how should i know whether with bias or without bias will be appropriate?
i am using XRF measurement to obtain the thickness of layer. thanks.
 
It depends what you are trying to do or reproduce. The same material can be bias sputtered or not, and each way may have its application. If you have no reason to bias, then don't complicate things for no purpose. Find litterature on your matarial and application, and see whether there is an advantage to biasing in your case. Google "bias substrate sputtering" for sample papers.
 

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