XRD FWHM, debye-scherrer's formula & AFM surface morphology

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SUMMARY

The discussion centers on the correlation between grain size measurements obtained from Debye-Scherrer's formula and Atomic Force Microscopy (AFM) results for Aluminum Nitride (AlN) epitaxial layer samples. The AFM results indicate a decreasing grain size trend, ranging from approximately 200 nm to 10 nm, while the Full Width at Half Maximum (FWHM) values from X-ray Diffraction (XRD) measurements are 0.24, 0.22, and 0.21 degrees. According to Scherrer's formula, an increase in FWHM should correspond to an increase in grain size, leading to a contradiction with the AFM findings. The discussion also raises a question regarding whether FWHM should be measured in radians or degrees for accurate calculations.

PREREQUISITES
  • Understanding of Debye-Scherrer's formula for grain size calculation
  • Familiarity with X-ray Diffraction (XRD) techniques
  • Knowledge of Atomic Force Microscopy (AFM) and its applications
  • Basic grasp of crystallography and grain size measurement
NEXT STEPS
  • Research the application of Debye-Scherrer's formula in different materials
  • Learn about the significance of FWHM in XRD analysis
  • Explore the relationship between AFM and XRD results in material characterization
  • Investigate the proper units for FWHM in Scherrer's equation
USEFUL FOR

Materials scientists, researchers in semiconductor fabrication, and anyone involved in the characterization of thin films and epitaxial layers will benefit from this discussion.

jcli0002
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Hi guys,
I have an question about the correlation between grain size caculated from debye-scherrer and the AFM results for my AlN epi layer samples.

From my AFM results, the trend of grain size of three samples are getting smaller( around 200-10 nm range among three samples). but the FWHM of XRD from the samples are 0.24,0.22,
0.21 degree. according to the scherrer's formula, the grain size should increase and get bigger.
it seems it contradict the AFM results.

I am wondering whether it is proper correlation between AFM results and the calculation from scherrer's formula.

THanks

J.C.
 
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Hi
I want to know, in scherre equation, the FWHM should be in gradian or degree?
 

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