- #1
MrMuscle
- 12
- 1
Hello, I am designing a resonant mems accelerometer. It has a resonating beam. We are actuating it by AC voltage + DC voltage. We are going to actuate it at beam's resonance frequency.
When I search for papers related to previous studies, I encounter resonance frequencies ranging from 20 kHz to 400 kHz.
What is the difference between having 20 kHz or 400 kHz? (Difference between having high and low frequency?)
My hypothesis is that, if you want to have a high frequency mems chip, you need high quality silicon (since it is high speed electronics you need a pure,crystalline material with low amount of atomic defects. )
Thanks for your answers.
When I search for papers related to previous studies, I encounter resonance frequencies ranging from 20 kHz to 400 kHz.
What is the difference between having 20 kHz or 400 kHz? (Difference between having high and low frequency?)
My hypothesis is that, if you want to have a high frequency mems chip, you need high quality silicon (since it is high speed electronics you need a pure,crystalline material with low amount of atomic defects. )
Thanks for your answers.