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ANSYS for MEMS (Especially Electrostatic)

  1. Jul 15, 2008 #1
    Does anyone have experience simulating MEMS (especially multi-coupled electrostatic analysis) in ANSYS that would answer a few questions.
  2. jcsd
  3. Jul 15, 2008 #2
    yes we do it all the time
  4. Jul 17, 2008 #3
    I am trying to simulate a 3d comb-drive structure and have had nothing but trouble. I have used their online resources and found a few examples but haven't been able to pull it all together yet. I guess the first question I would ask you is when you are building your model what kind of process do you go through? Do you write 2 physics files (structural and electrostatic) and then solve or is there a better way?

    Thank you for your help
  5. Jul 17, 2008 #4
    i suggest you using direct coupled elements. there are elements with electrostatic and mechanical degrees of freedom. doing so may increase your computation time but its easier for beginners. also i strongly suggest you using ansys description language, it will make life a lot more easier.
  6. Jul 17, 2008 #5
    for example plane13
  7. Jul 18, 2008 #6
    Thank you for your help. I have been using APDL to analyze my structures. I hadn't tried using PLANE13 yet, I have been using PLANE223. I had bought the Multiphysics for MEMS training manual and it had said it was an older element with no active development. Thank you for the recommendation, I will give it a try and see if that will help me out a bit.
  8. Feb 15, 2009 #7
    is it possible to do electromagnetic simulation for a mems capacitive switch using ansys
  9. Jul 29, 2009 #8
    hi, I am facing with some problems in working with mems in ANSYS. you said that you have got the Multiphysics for MEMS training manual.how could I have the same manual. would you tell me?

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