ANSYS for MEMS (Especially Electrostatic)

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Discussion Overview

The discussion revolves around simulating Micro-Electro-Mechanical Systems (MEMS), particularly focusing on multi-coupled electrostatic analysis using ANSYS software. Participants share their experiences, challenges, and techniques related to modeling and simulation processes.

Discussion Character

  • Exploratory
  • Technical explanation
  • Debate/contested
  • Homework-related

Main Points Raised

  • Some participants have experience simulating MEMS in ANSYS and are willing to share insights.
  • One participant describes difficulties in simulating a 3D comb-drive structure and seeks advice on the modeling process.
  • There is a suggestion to use direct coupled elements for easier simulation, despite potential increases in computation time.
  • One participant mentions using APDL for analysis and expresses interest in trying different elements, specifically PLANE13, after receiving a recommendation.
  • A question is raised about the possibility of conducting electromagnetic simulations for a MEMS capacitive switch using ANSYS.
  • Another participant inquires about obtaining the Multiphysics for MEMS training manual mentioned in the discussion.

Areas of Agreement / Disagreement

Participants share various techniques and experiences, but there is no consensus on the best approach for simulating MEMS in ANSYS. Multiple viewpoints and methods are presented without resolution.

Contextual Notes

Some discussions involve specific elements and their development status, as well as the use of different simulation techniques, which may depend on individual project requirements and preferences.

Who May Find This Useful

Individuals interested in MEMS simulation, particularly those using ANSYS software, may find the shared experiences and suggestions relevant to their work.

jstippey
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Does anyone have experience simulating MEMS (especially multi-coupled electrostatic analysis) in ANSYS that would answer a few questions.
 
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yes we do it all the time
 
I am trying to simulate a 3d comb-drive structure and have had nothing but trouble. I have used their online resources and found a few examples but haven't been able to pull it all together yet. I guess the first question I would ask you is when you are building your model what kind of process do you go through? Do you write 2 physics files (structural and electrostatic) and then solve or is there a better way?

Thank you for your help
 
i suggest you using direct coupled elements. there are elements with electrostatic and mechanical degrees of freedom. doing so may increase your computation time but its easier for beginners. also i strongly suggest you using ansys description language, it will make life a lot more easier.
 
for example plane13
 
Thank you for your help. I have been using APDL to analyze my structures. I hadn't tried using PLANE13 yet, I have been using PLANE223. I had bought the Multiphysics for MEMS training manual and it had said it was an older element with no active development. Thank you for the recommendation, I will give it a try and see if that will help me out a bit.
 
is it possible to do electromagnetic simulation for a mems capacitive switch using ansys
 
hi, I am facing with some problems in working with mems in ANSYS. you said that you have got the Multiphysics for MEMS training manual.how could I have the same manual. would you tell me?


jstippey said:
Thank you for your help. I have been using APDL to analyze my structures. I hadn't tried using PLANE13 yet, I have been using PLANE223. I had bought the Multiphysics for MEMS training manual and it had said it was an older element with no active development. Thank you for the recommendation, I will give it a try and see if that will help me out a bit.
 

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