How to add HZO as an Oxide gate in Silvaco TCAD?

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SUMMARY

This discussion focuses on the integration of HZO (Hf0.5Zr0.5O2) as an oxide gate material in Silvaco TCAD for simulating Gate-All-Around FETs. The user seeks assistance with the specific code required to implement HZO within the Silvaco TCAD environment. Examples from Silvaco are referenced to provide context for the implementation process. The conversation highlights the need for precise coding techniques to effectively utilize HZO in semiconductor simulations.

PREREQUISITES
  • Familiarity with Silvaco TCAD software
  • Understanding of Gate-All-Around FET architecture
  • Knowledge of HZO (Hf0.5Zr0.5O2) material properties
  • Basic coding skills in the context of semiconductor simulations
NEXT STEPS
  • Research Silvaco TCAD documentation for HZO integration
  • Explore examples of Gate-All-Around FET simulations in Silvaco
  • Learn about the electrical properties of HZO in semiconductor applications
  • Investigate coding techniques for oxide materials in Silvaco TCAD
USEFUL FOR

Researchers, graduate students, and engineers working on semiconductor device simulations, particularly those focusing on Gate-All-Around FETs and oxide materials in Silvaco TCAD.

mhr0003
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TL;DR
Help me add hafnium zirconium oxide in Silvaco
I am trying to simulate a Gate-All-Around FET in Silvaco TCAD for my thesis but I can't figure out how to add HZO (Hf0.5Zr0.5O2). I would really appreciate it if anyone could help me with the code for HZO or help me in any other way.
Thank you.
 
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Here are some examples from Silvaco:
 

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