How to add HZO as an Oxide gate in Silvaco TCAD?

Thread starter mhr0003
Start date Jan 24, 2023
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Gate Mosfet silvaco Simulation software

AI Thread Summary

To simulate a Gate-All-Around FET in Silvaco TCAD using HZO (Hf0.5Zr0.5O2) as an oxide gate, specific coding guidance is needed. Users are seeking assistance with the appropriate code to incorporate HZO into their simulations. Examples from Silvaco may provide insights but do not directly address the HZO integration. The discussion emphasizes the need for clear instructions or code snippets to facilitate this process. Assistance from experienced users in the community is crucial for successful simulation setup.

Jan 24, 2023

mhr0003

TL;DR Summary: Help me add hafnium zirconium oxide in Silvaco

I am trying to simulate a Gate-All-Around FET in Silvaco TCAD for my thesis but I can't figure out how to add HZO (Hf_0.5Zr_0.5O₂). I would really appreciate it if anyone could help me with the code for HZO or help me in any other way.
Thank you.

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Feb 8, 2023

phyzguy

Science Advisor

Here are some examples from Silvaco:

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