Measuring Mems Capacitance with a Ring Oscillator

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    Capacitor Measure
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SUMMARY

This discussion focuses on measuring the capacitance of MEMS parallel plate capacitors using a ring oscillator. A ring oscillator can effectively measure capacitance by analyzing the frequency response, which is influenced by the capacitor's value. Participants suggest that an ordinary capacitor bridge or an LCR meter may also be viable alternatives, but emphasize the need to account for the inductance and capacitance of the measuring circuit. The precision and frequency of measurement are critical factors to consider for accurate results.

PREREQUISITES
  • Understanding of ring oscillator circuits
  • Familiarity with capacitance measurement techniques
  • Knowledge of LCR meters and capacitor bridges
  • Basic principles of circuit design and compensation techniques
NEXT STEPS
  • Research the operation and design of ring oscillators for capacitance measurement
  • Learn about using LCR meters for measuring small capacitances
  • Study the principles of circuit compensation for inductance and capacitance
  • Explore the specifications and applications of MEMS capacitors
USEFUL FOR

Electrical engineers, circuit designers, and researchers involved in MEMS technology and capacitance measurement techniques will benefit from this discussion.

kaikaiar10
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Hi all, I need to find a way to measure the capacitance of a mems parallel plate capacitor, can anyone tell me some help on this? The professor suggested a ring oscillator, can someone tell me how can a ring oscillator measure capacitance? I don't have much background on circuit parts, so I appreciate any help

thanks
 
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Do you have a rough idea about what kind of value you would expect? Precision?
And at what frequency do you want to measure C?
If you are lucky and ordinary capacitor bridge will work, or even an LCR meter.
 
MEMS caps are tiny, right? You will need to compensate for the inductance and capacitance of your measuring circuit. Are you going to put the circuit on the IC with the MEMS cap?

http://www.eecs.berkeley.edu/~boser/pdf/capacitor.pdf
 
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