Silver RF magnetron sputtering targets

  • Context: Graduate 
  • Thread starter Thread starter spearme
  • Start date Start date
  • Tags Tags
    Rf Silver Sputtering
Click For Summary
SUMMARY

The discussion centers on the issue of a white layer observed on a silver RF magnetron sputtering target after venting the system for cleaning. Users suggest that the white layer could be due to surface roughness or a thin oxide layer, although silver oxide is typically black. The removal of the white layer was achieved using a Dremel tool for polishing. Additionally, the user noted that recent deposition inconsistencies may be attributed to a faulty thickness monitor rather than the target itself.

PREREQUISITES
  • Understanding of RF magnetron sputtering technology
  • Familiarity with surface analysis techniques such as X-ray photoelectron spectroscopy (XPS) and energy-dispersive X-ray spectroscopy (EDX)
  • Knowledge of target material properties, specifically silver
  • Experience with deposition monitoring tools and their maintenance
NEXT STEPS
  • Investigate the effects of surface roughness on sputtering performance
  • Learn about XPS and EDX for analyzing thin film compositions
  • Research maintenance procedures for thickness monitors in sputtering systems
  • Explore the properties and behaviors of silver and its oxides in sputtering applications
USEFUL FOR

This discussion is beneficial for materials scientists, engineers working with sputtering technology, and technicians involved in thin film deposition processes.

spearme
Messages
2
Reaction score
0
Hi,
I'm hoping someone out there can help me. I've vented my system to clean her out this week and as I was checking my targets I noticed that the whole sputtering surface of my silver target was white. I've been able to clean the white layer off but have no idea what it is or how it happened! Do old silver targets just turn white after long use or do I have some contamination in my system!
Thanks in advance for any help.
 
Physics news on Phys.org
One possibility is simply that the surface of the target is rough, and reflecting light in a diffuse manner. Otherwise, perhaps you had a thin oxide layer on your target? You could use XPS/EDX to investigate the composition of your last grown material, and see if there is any other contaminant there?
How did you manage to remove the white layer?
 
Thanks for the advice!
My depositions of late have been slightly off from what I expected but I think that it has been down to my thickness monitor needing a new crystal rather than the silver as EDX tells me they're pure silver films.I don't think its an oxide layer,as I'm under the impression that silver oxide is black. Surface roughness isn't a bad idea at all! I'll have a look into that and see what comes up. To clean the target surface I used a Dremel tool with to polish the surface back to silver.
Thanks a lot!
 

Similar threads

Graduate Can RF Sputtering cause the the ejected target to ionise?
  • · Replies 2 ·
Replies
2
Views
3K
DC Sputtering of Silicon without Magnetron
  • · Replies 2 ·
Replies
2
Views
3K
Surface oxidation of aluminum alloy and electrical continuity
  • · Replies 16 ·
Replies
16
Views
5K
I am grappling with a gravity fed water system and have questions
  • · Replies 21 ·
Replies
21
Views
9K
Research question about burning metals and their flashes and colors
  • · Replies 12 ·
Replies
12
Views
6K
Graduate Bulk and Slab electronic structure differences
  • · Replies 6 ·
Replies
6
Views
4K
Graduate Simple math model for a Particle Image Velocimetry system
  • · Replies 6 ·
Replies
6
Views
1K
Courses What Elective Classes Should I Take for a BSEE to Specialize in FPGA and RF Systems?
  • · Replies 2 ·
Replies
2
Views
2K
Best catapult/launcher for the following?
  • · Replies 14 ·
Replies
14
Views
5K
Admissions How to improve graduate school applications after college?
  • · Replies 32 ·
2
Replies
32
Views
4K