Wow, read some Tay papers this weekend and I think your referral may be saving me hundreds of dollars by switching to a cheaper substrate and eliminating Au entirely. With a D263 substrate and Mo mask I should be able to reproduce similar success to Tay's. I'll try a similar method with the...
I have looked at many papers on Au and Si masks for SiO2 and Pyrex. Unfortunately Pyrex has a much weaker dielectric strength than pure silica, I need the dielectric properties similar to pure silica.
Thank you for the lead on F.E.H. Tay, I've found a few papers of his to review this weekend...
The mask I am trying to perfect is Cr-Au-Cr-Au with Au covering Cr sidewalls for delamination prevention then SU8 on top to prevent pin holes. The cleaner I make the process the better the adhesion so far. I don't think I have powder blast available to me at CU but with some expensive training...
I've been struggling and wasting mask materials trying to etch SiO2 wafers. The orientation of the etch is not a huge issue. I need to perform a detailed anisotropic etch on my feature side and etch the bulk depth from the other side.
For my bulk etch I have tried multiple masks in BOE...
If your wafer is SiO2 you CAN NOT accomplish that etch with KOH. In theory you could with BOE, but deep wet etches in SiO2 present many problems and there is not a 111 plan to etch at a sharp angle as with KOH. BOE would leave rounded edges, would under cut your mask and it is difficult to...
KOH is used to etch Si, SiO2 or Si3N4 is often used as a mask material. Not sure what you want as a free standing structure. If you wanted a cantilever structure in KOH than the correct mask can achieve this.
If you want to undercut a Si structure by etching SiO2 bellow you want to use HF...
Depends where you do it? University will most likely be cheapest, unless you want bulk fabrication.
At my University it cost about $100/hr for lab use (with a max charge of only 4hrs), about $80 for a gram of gold and you'd have to be trained on the evaporator. The only sputter machine in...
I just joined this forum in hope that there is some micro-nano fab discussions going on. I am a post grad, (graduated in Dec 2010) finishing up some nano fab research. Here at CU, nano-micro fab is pretty big in the Mechanical Department. Any professor with budget and confidence in you can...