To convert mass flow rate to molar flow rate, divide the mass flow rate by the molecular weight of the gas, rather than using density. While common mass flow meter units like SLPM or SCCM are used, converting from SLPM to mass/time does require knowledge of the gas's standard density, which can vary based on reference temperature. This variability can introduce significant errors, often around 10%. For accurate conversions, the ideal molar volume under standard conditions (P=101325 Pa, T=273.15 K) should be applied, with 1 sccm equating to approximately 0.74358 µmol/s. Understanding these factors is crucial for precise flow rate calculations.