Generating EUV Light Without High Costs

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SUMMARY

The discussion centers on the challenges of generating extreme ultraviolet (EUV) light, specifically in the wavelength range of <150nm, without incurring exorbitant costs. Participants agree that producing EUV light typically requires significant investment, often around a million dollars, and that no viable methods exist without specific requirements for wavelength, intensity, and duration. The closest alternative mentioned is the use of gas discharge lamps (Xe, Ar, Kr, Hg), which unfortunately produce longer wavelengths. The consensus is that any practical application of EUV, such as lithography or micromachining, necessitates precise specifications.

PREREQUISITES
  • Understanding of EUV light generation techniques
  • Familiarity with gas discharge lamps and their limitations
  • Knowledge of applications for EUV light, particularly in lithography
  • Basic concepts of wavelength and intensity in light production
NEXT STEPS
  • Research advancements in EUV lithography technology
  • Explore the capabilities and limitations of gas discharge lamps for light generation
  • Investigate alternative methods for producing EUV light, including emerging technologies
  • Learn about safety measures and health risks associated with EUV exposure
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Engineers, researchers, and developers in the fields of photonics, semiconductor manufacturing, and materials science who are interested in EUV light applications and generation methods.

YoshiBeans
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My question is: if you had no requirements for specific wavelength, intensity, duration, etc., are there ways of producing euv light (<150nm) without billions of dollars of equipment and power requirements in the KWs at most. Any Ideas?
 
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No. This is an area of technology where if you have to ask us, the answer is no.
BTW, "no requirements for specific wavelength, intensity, duration"; really?
Also, it's not billions, maybe a million dollars to do something useful with euv.

The closest cheap way that I know of would be a gas discharge lamp, Xe, Ar, Kr, Hg, etc. But you'll mostly get longer wavelengths.
 
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YoshiBeans said:
no requirements for specific wavelength, intensity, duration, etc. ... are there ways of producing euv light (<150nm)
Be more careful with your definitions, please. Right now, it includes soft X-ray too, and all you need for that is an old style CRT tube.
 
Rive said:
Be more careful with your definitions, please. Right now, it includes basic X-ray too, and all you need for that is an old style CRT tube.
Good point. Also cosmic rays, they're free.
The broader point is that NOBODY that needs EUV will have no specifications.
I'd also warn about skin cancer, burns, and cataracts, but this isn't actually going to happen, so I'm not worried.
 
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Wow, quick responses. Ok, fair points above, and I think I have my answer now anyway.
Just for the sake of completeness, I would be thinking of the range from approx. 125-150nm. Meaning the discharge lamps are unfortunately too long wave.
 
DaveE said:
No. This is an area of technology where if you have to ask us, the answer is no.
BTW, "no requirements for specific wavelength, intensity, duration"; really?
Also, it's not billions, maybe a million dollars to do something useful with euv.

The closest cheap way that I know of would be a gas discharge lamp, Xe, Ar, Kr, Hg, etc. But you'll mostly get longer wavelengths.
Can i ask what you mean by "do something useful"?
 
YoshiBeans said:
Can i ask what you mean by "do something useful"?
IDK, maybe ask google? The only euv application that comes to my mind is lithography or maybe micromachining?
 
DaveE said:
IDK, maybe ask google? The only euv application that comes to my mind is lithography or maybe micromachining?
Google was my first stop, hence my attempt to tap the big brains.

Appreciate the help all the same. Guess ill keep my fingers crossed for some significant innovation in the area.
 

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