Pollution from semiconductor fabrication

aquitaine
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I read about the closing of GMT's semiconductor fab (that happened in 2001) because it was on the EPA's list of hazardous waste sites and that made me wonder, both historically and now what pollution has come from semiconductor fabrication?
 
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Thread 'Weird near-field phenomenon I get in my EM simulation'

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I recently made a basic simulation of wire antennas and I am not sure if the near field in my simulation is modeled correctly. One of the things that worry me is the fact that sometimes I see in my simulation "movements" in the near field that seems to be faster than the speed of wave propagation I defined (the speed of light in the simulation). Specifically I see "nodes" of low amplitude in the E field that are quickly "emitted" from the antenna and then slow down as they approach the far...
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