Troubleshooting Vacuum Gauge Fluctuations in Chemical Vapour Deposition Unit

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The discussion focuses on troubleshooting issues with a Pirani gauge in a chemical vapor deposition unit, which is used for coating silver thin films. The gauge is not providing consistent readings, while a Penning gauge shows normal pressure. Participants suggest potential causes, including contamination of the gauge, electronic issues, or problems with the vacuum pump affecting pressure readings. There is also a consideration of whether the chemicals used might react with the gauge materials. Effective troubleshooting steps are sought to resolve the fluctuating readings.
shourie.j
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Hi Everybody

am using chemical vapour deposition unit for coating silver thin films.
The pirani gauge is not showing readings, t he readings are fluctuating, but the penning gauge shows reading. am not able to make out where is the problem.

1. is the gauge needs to be cleaned due to contamination, or some electronic problem in the display?
2. is the problem with the vacuum pump, since the pressure is not created, the pirani gauge doesn't show the reading?

can you give me a suggestion how to troubleshoot my problem.
 
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Even if the vacuum pump didn't work the gauge should still read some kind of pressure.
Is the chemical you are using reactive with what ever material the gauge is made of.
 

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