What Equipment is Used in VLSI Technology for Wafer Preparation?

[vead]

I need someone to check my home work

wafer preparation

The Attempt at a Solution

material for wafer preparation
raw material - silicon is raw material

MGS metalluragical grade silicon
EGS electron grade silicon wafer making equipment

crucible pure silicon is placed in crucible that is made of quartz
crucible supporter
vacuum chamber crucible is then put in vacuum chamber which is sealed and then filled with some gas
heater

the chamber is heated up to 1500 c to melt silicon
crucible shaft
when silicon is melted nicely the seed is rotated as it slowly pulled out of molten silicon is it all equipment or we need another

 

[SteamKing]

The Rules at PF ask that you follow the HW template when asking a HW type question.

 

[berkeman]

I need someone to check my home work

wafer preparation

The Attempt at a Solution

material for wafer preparation
raw material - silicon is raw material

MGS metalluragical grade silicon
EGS electron grade silicon


wafer making equipment

crucible pure silicon is placed in crucible that is made of quartz
crucible supporter
vacuum chamber crucible is then put in vacuum chamber which is sealed and then filled with some gas
heater

the chamber is heated up to 1500 c to melt silicon
crucible shaft
when silicon is melted nicely the seed is rotated as it slowly pulled out of molten silicon


is it all equipment or we need another

Your post makes no sense, especially without the Homework Help Template that you were provided.

What is the exact problem statement?

What are the relevant materials and processes?

What part of what you posted is your attempt at the solution?

 

[vead]

Homework Statement

I am not sure that my home work is correct or wrong
someone please check out this

Homework Equations

I have goofle and I read some pdf file


wafer preparation

The Attempt at a Solution

material for wafer preparation
raw material - silicon is raw material

MGS metalluragical grade silicon
EGS electron grade silicon


wafer making equipment

crucible pure silicon is placed in crucible that is made of quartz
crucible supporter
vacuum chamber crucible is then put in vacuum chamber which is sealed and then filled with some gas
heater

the chamber is heated up to 1500 c to melt silicon
crucible shaft
when silicon is melted nicely the seed is rotated as it slowly pulled out of molten silicon

IS it enough to post question on the forum ?

 

[berkeman]

What is the exact problem statement from your homework?

 

[vead]

does anyone know the equipment that is used in vlsi technology

chamber , quartz tube ,furnace

which equipment used for oxidation , ion implantation and diffusion