When an energetic electron hits an atom it can knock out a core electron. Then one of two things can happen:
(i) An electron from a higher shell can fall into the vacancy in the lower shell, accompanied by the emission of an X-ray photon.
(ii) An electron from a higher shell can fall into the vacancy in the lower shell, while another outer electron is expelled from the atom (Auger electron).
The quantum yield of X rays increases with atomic number; light elements give mostly Auger electrons and heavy elements mostly X rays. The crossover is somewhere around zinc (Z = 30). Thus glass, containing mainly Si and O, will give a lower yield of X rays than a heavier metal, such as iron or tungsten.
Thus much I know from my acquaintance with SEM. Why things are that way round, I don't know.