Learning about microfrabrication

  • Thread starter ChaseRLewis73
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In summary, the conversation discusses the making of masks with sub-micrometer level accuracy using lasers. The use of electron beams is recommended for higher accuracy since light is diffraction limited at visible wavelengths. Recommended methods include interference-based UV light methods, with reported accuracies of 1-5 nm.
  • #1
ChaseRLewis73
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Few questions:

1. How are the masks made for sub micrometer level accuracy. Laser? Namely even with lasers how would they guarantee the positioning system to that level of accuracy to aim the laser how they want?
2. Any recommended books?
 
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  • #2
Electron beams. Light doesn't suffice.
 
  • #3
Ya been reading the typical way is lensing of an electron beam. They trace out a larger version (micron to 10 micron accuracy) but have lensing effects that convert that to nanometer accuracy.

Light is diffraction limited at visible wavelengths giving maximum accuracy at about 1 - 5 x 10-7 but is wavelength dependent.

It seems that there are ways around that but none are practically used. Generally interference based methods of UV light (reported accuracies between 1 - 5 nm).

Electron wavelength is just way smaller so it is more accurate.
 

What is microfabrication?

Microfabrication is the process of creating very small structures, devices, or patterns on a microscopic scale. This involves techniques such as lithography, etching, and deposition to manipulate materials at the microscale level.

What are the applications of microfabrication?

Microfabrication has a wide range of applications, including microelectronics, microfluidics, biosensors, photovoltaics, and medical devices. It is also used in the production of microchips, microsensors, and microactuators for various industries.

What are the key techniques used in microfabrication?

The main techniques used in microfabrication include photolithography, etching, and deposition. Photolithography uses light to transfer patterns onto a photosensitive material. Etching removes material to create patterns, while deposition adds material to create structures.

What are the challenges in microfabrication?

Microfabrication involves working with incredibly small structures, which can be challenging due to the limitations of equipment and materials. Precision and accuracy are crucial, and the process can be time-consuming and expensive. Ensuring the uniformity and consistency of the microstructures is also a significant challenge.

What are some emerging trends in microfabrication?

Some emerging trends in microfabrication include the use of new materials, such as graphene and carbon nanotubes, to create smaller and more efficient devices. There is also a focus on developing more sustainable and environmentally friendly methods of microfabrication. 3D printing and additive manufacturing techniques are also being explored for microfabrication applications.

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