Lithium fluoride (LiF) etching/patterning possible?

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SUMMARY

Lithium fluoride (LiF) can be patterned using standard lithography techniques, similar to SiO2 glass, but specific etching methods for LiF are not well-documented in existing literature. The discussion highlights the potential for dry etch chemistry, although caution is advised due to the hazardous nature of hydrofluoric acid (HF) produced when LiF is dissolved in strong acids like HNO3 and H2SO4. Plasma etching is suggested as a viable method due to its versatility in interacting with various materials.

PREREQUISITES
  • Understanding of standard lithography techniques
  • Familiarity with plasma etching processes
  • Knowledge of chemical safety, particularly regarding HF
  • Basic concepts of material compatibility in etching
NEXT STEPS
  • Research plasma etching techniques for LiF
  • Investigate alternative etching chemistries for fluoride materials
  • Explore safety protocols for handling HF and other hazardous chemicals
  • Review existing literature on etching experiments involving LiF
USEFUL FOR

This discussion is beneficial for materials scientists, semiconductor engineers, and researchers involved in etching and patterning processes, particularly those working with lithium fluoride and similar materials.

DivGradCurl
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Does any of you know about Lithium fluoride (LiF) etching/patterning?

I'm wondering if I can pattern a slab of LiF as if it were SiO2 glass: standard lithography, followed by etch. But I haven't found anything in the literature about LiF etching experiments. I'd like to use dry etch chemistry if that's possible.

Thanks
 
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LiF is soluble in HNO3 and H2SO4 but I wouldn't recommend you to do that since produced HF is very dangerous.
 
Do you have access to even an older fab? Plasma etch is pretty catholic in terms of material it will interact with.
 

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