Lithium fluoride (LiF) etching/patterning possible?

[DivGradCurl]

Does any of you know about Lithium fluoride (LiF) etching/patterning?

I'm wondering if I can pattern a slab of LiF as if it were SiO2 glass: standard lithography, followed by etch. But I haven't found anything in the literature about LiF etching experiments. I'd like to use dry etch chemistry if that's possible.

Thanks

 

[Alkim]

LiF is soluble in HNO3 and H2SO4 but I wouldn't recommend you to do that since produced HF is very dangerous.

 

[etudiant]

Do you have access to even an older fab? Plasma etch is pretty catholic in terms of material it will interact with.