Lithium fluoride (LiF) etching/patterning possible?

  1. Does any of you know about Lithium fluoride (LiF) etching/patterning?

    I'm wondering if I can pattern a slab of LiF as if it were SiO2 glass: standard lithography, followed by etch. But I haven't found anything in the literature about LiF etching experiments. I'd like to use dry etch chemistry if that's possible.

    Thanks
     
  2. jcsd
  3. LiF is soluble in HNO3 and H2SO4 but I wouldn't recommend you to do that since produced HF is very dangerous.
     
  4. etudiant

    etudiant 902
    Gold Member

    Do you have access to even an older fab? Plasma etch is pretty catholic in terms of material it will interact with.
     
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