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Lithium fluoride (LiF) etching/patterning possible?

  1. Nov 3, 2013 #1
    Does any of you know about Lithium fluoride (LiF) etching/patterning?

    I'm wondering if I can pattern a slab of LiF as if it were SiO2 glass: standard lithography, followed by etch. But I haven't found anything in the literature about LiF etching experiments. I'd like to use dry etch chemistry if that's possible.

  2. jcsd
  3. Nov 12, 2013 #2
    LiF is soluble in HNO3 and H2SO4 but I wouldn't recommend you to do that since produced HF is very dangerous.
  4. Nov 12, 2013 #3


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    Do you have access to even an older fab? Plasma etch is pretty catholic in terms of material it will interact with.
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