I also do some work with silane-chemistry self-assembled monolayers. In my experience, Piranha clean or a gentle oxygen (and some suggest water) plasma are great ways to ACTIVATE the surface SiO2 (from say, the native oxide) and make it more accepting of silanes. A small percentage of silanols will form in the presence of moisture, but many more will form when treated as previous. Then again, I purposefully make use of the native oxide, rather than thermally growing a thicker one.
If you can do things in a dry box, heating the substrate up to around 120 C will also dehydrate the surface, eliminating your silanols. If you don't mind completely removing the native oxide layer, have you considered using a Buffered Oxide Etch or hydrofluoric acid? They're meant for stripping SiO2, and I've been able to completely remove (silane) SAMs from silicon substrates this way.
WARNING: Despite being relatively weak acids, Buffered Oxide Etch and (high concentrations of) hydrofluoric acid are extremely poisonous, and if you need to use them (and don't know how), find someone who knows what they're doing to give you a hand!
https://www.physicsforums.com/showthread.php?t=312420
I'm not sure what impact HF might have upon your thiols (it shouldn't have an impact on the gold layer), but you can probably determine the impact with a little experiment. Actually, have you used any techniques to look for (or better yet, quantize) the amount of sulphur on the gold versus silicon surfaces? If not, this will help you determine the extent of the problem.
L. T. Zhurvalev did a lot of work on (albeit) silica and hydroxylated surfaces--some of that (or the follow-on work by others) might be of interest to you.