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Calculating moleculalar flux from deposition rate.

  1. May 15, 2012 #1
    I have deposition rate of Silicon dioxide as 1000A/minute. I need to calculate molecular flux to the surface. First I tried to use ideal gas theory but since SiO2 is not ideal gas therefore my answer was completely wrong. I am disoriented. Can any body help. I know the answer is 3.8E15 molecules/cm2 second.

    PS: It is not homework assignment. I need to calculate it to determine flux ratio.
  2. jcsd
  3. May 15, 2012 #2
    What is the process for deposition?
  4. May 15, 2012 #3
    It is evaporated using e-gun in UHV of around 10-9 Torr.
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