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Why are line and dot function useful in EBL?

  1. Nov 12, 2014 #1
    Hi all, I am new to here and also new to EBL. I belive Electron Beam Lithography has a limit of sub-10 nms. Today when I draw a CAD file, I saw other than area, we can also draw line and dots. That doesn't make sense since there is a limitation on feature size and line width has to be at least bigger than that limit.
    Is line and dot really useful in EBL writing?
  2. jcsd
  3. Nov 13, 2014 #2


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    Staff: Mentor

  4. Nov 13, 2014 #3

    Thanks! I am totally new and cannot find the right place. I have posted the question there.
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