Why are line and dot function useful in EBL?

[Yinxiao Li]

Hi all, I am new to here and also new to EBL. I believe Electron Beam Lithography has a limit of sub-10 nms. Today when I draw a CAD file, I saw other than area, we can also draw line and dots. That doesn't make sense since there is a limitation on feature size and line width has to be at least bigger than that limit.
Is line and dot really useful in EBL writing?

 

[jtbell]

Welcome to Physics Forums!

I suggest you ask this question in our Materials & Chemical Engineering forum:

https://www.physicsforums.com/forums/materials-chemical-engineering.105/

It appears to me to be the best place for nanotechnology-related questions.

This forum (New Member Introductions) is just for saying "hello" and some chit-chat.

 

[Yinxiao Li]

Welcome to Physics Forums!

I suggest you ask this question in our Materials & Chemical Engineering forum:

https://www.physicsforums.com/forums/materials-chemical-engineering.105/

It appears to me to be the best place for nanotechnology-related questions.

This forum (New Member Introductions) is just for saying "hello" and some chit-chat.

Thanks! I am totally new and cannot find the right place. I have posted the question there.