Calculating moleculalar flux from deposition rate.

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    Deposition Flux Rate
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SUMMARY

The discussion centers on calculating molecular flux from a deposition rate of Silicon dioxide (SiO2) at 1000 Å/minute. The user initially attempted to apply ideal gas theory but found it unsuitable due to SiO2's non-ideal behavior, leading to incorrect results. The correct molecular flux is established as 3.8E15 molecules/cm² per second. The deposition process involves evaporation using an electron gun (e-gun) in ultra-high vacuum (UHV) conditions of approximately 10-9 Torr.

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Ravian
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I have deposition rate of Silicon dioxide as 1000A/minute. I need to calculate molecular flux to the surface. First I tried to use ideal gas theory but since SiO2 is not ideal gas therefore my answer was completely wrong. I am disoriented. Can anybody help. I know the answer is 3.8E15 molecules/cm2 second.
Thanks

PS: It is not homework assignment. I need to calculate it to determine flux ratio.
 
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What is the process for deposition?
 
It is evaporated using e-gun in UHV of around 10-9 Torr.
 

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