Questions regarding Basics of EBPVD

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SUMMARY

The discussion focuses on the fundamentals of Electron Beam Physical Vapor Deposition (EB-PVD) and the relationship between electron gun power and target material vaporization. The participant seeks to understand how various parameters, including the heat of vaporization for different elements, affect the coating process and target consumption. A PhD thesis is recommended as a resource, particularly for its “Machine Dynamics Model,” which details the dynamics of EB-PVD components such as cathode heating and evaporation.

PREREQUISITES
  • Understanding of Electron Beam Physical Vapor Deposition (EB-PVD) technology
  • Knowledge of heat of vaporization for various materials
  • Familiarity with electron gun operation and power settings
  • Basic principles of coating processes and substrate interactions
NEXT STEPS
  • Research the “Machine Dynamics Model” in the recommended PhD thesis on EB-PVD
  • Study the heat of vaporization for different elements relevant to EB-PVD
  • Explore the operational parameters of electron guns used in EB-PVD systems
  • Investigate the effects of varying power settings on target consumption in EB-PVD
USEFUL FOR

Researchers, engineers, and technicians involved in materials science, particularly those working with coating technologies and EB-PVD systems.

AndrewB
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Hi All,

I am new to a laboratory and they have this EB-PVD machine. I would like to know how several parameters affect the coating as well as the target.

The basic concept that I know about EB-PVD is that electrons are accelerated so that it can heat the target and eventually reach a point wherein the target vaporizes and somehow sticks to a substrate. The target gets "eaten up" in the process. I would like to find a rough calculation or estimate to how much power I can give to a certain target so that I would eat up the target holder.

But with all the papers that I read, authors specify the target and the power of the Electron Gun. Every element has its own heat of vaporization and I would like to understand the relation of the Gun Power and the target.

Any reference, links and inputs are welcome. Your help is very much appreciated.
 
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AndrewB, Welcome to Physics Forums!

Here is a PhD thesis that describes these devices. I think you will find specific answers here. See especially the “Machine Dynamics Model” which combines models of various component dynamics in the EB-PVD machine such as cathode heating, ingot melting, and evaporation.

https://etda.libraries.psu.edu/paper/7573/2847
 

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