Questions regarding Basics of EBPVD

[AndrewB]

Hi All,

I am new to a laboratory and they have this EB-PVD machine. I would like to know how several parameters affect the coating as well as the target.

The basic concept that I know about EB-PVD is that electrons are accelerated so that it can heat the target and eventually reach a point wherein the target vaporizes and somehow sticks to a substrate. The target gets "eaten up" in the process. I would like to find a rough calculation or estimate to how much power I can give to a certain target so that I would eat up the target holder.

But with all the papers that I read, authors specify the target and the power of the Electron Gun. Every element has its own heat of vaporization and I would like to understand the relation of the Gun Power and the target.

Any reference, links and inputs are welcome. Your help is very much appreciated.

 

[Bobbywhy]

AndrewB, Welcome to Physics Forums!

Here is a PhD thesis that describes these devices. I think you will find specific answers here. See especially the “Machine Dynamics Model” which combines models of various component dynamics in the EB-PVD machine such as cathode heating, ingot melting, and evaporation.

https://etda.libraries.psu.edu/paper/7573/2847