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Cleaning of SGOI and SiGe substartes

  1. Apr 2, 2017 #1
    Can you suggest how can i clean SGOI, SiGe, GOI substrates for initial cleaning, Oxides etching, Photo resist removal, Organic impurity removal, Metallic impurity removal etc?

    Can i follow the same procedure which are used for Si wafers like Piranha and HF cleaning?
  2. jcsd
  3. Apr 3, 2017 #2


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