Cleaning of SGOI and SiGe substartes

[Goyal C P]

Can you suggest how can i clean SGOI, SiGe, GOI substrates for initial cleaning, Oxides etching, Photo resist removal, Organic impurity removal, Metallic impurity removal etc?

Can i follow the same procedure which are used for Si wafers like Piranha and HF cleaning?

 

[TeethWhitener]

https://www.seas.upenn.edu/~nanosop/documents/Etchratesformicromachiningprocessing.pdf

Piranha looks ok for SiGe, but this study indicates that there may be some slow etching with HF.